Wasa K., Hayakawa S. Handbook of sputter deposition technology. Principles, Technology and Applications

Westwood, NJ: Noyes Publications, 1993. — xii, 304 p. — (Materials Science and Process Technology Series). — ISBN10: 0-8155-1280-5; ISBN13: 978-0815512806.A concise, comprehensive overview of sputter deposition technology, a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production, and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.Thin Film Materials and Devices
Thin Film Processes
Sputtering Phenomena
Sputtering Systems
Deposition of Compound Thin Films
Microfabrication by Sputtering
Future Directions